Global supply chains are already reeling from the impact of China's rare earth export controls, but an even bigger critical ...

In this work, we demonstrate an advanced 22 nm fully depleted silicon-on-insulator substrate (FD-SOI) process for very large scale integrated circuit (VLSI). The fabrication process features hybrid ...

Companies building next-generation products and breakthrough technologies are often limited by the physical constraints of ...

In the gate last process, also known as replacement metal gate (RMG), amorphous silicon in the dummy gate should be removed first, then work function metal and metal gate should be filled. This ...